Development of a scanning probe microscope compact sensor head featuring a diamond probe mounted on a quartz tuning fork

Measurement Science and Technology

Volumn 14, Issue 12, 2003, Pages 2139-2143

  Tyrrell, James W G ^a   Sokolov, Dmitri V ^a   Danzebrink, Hans Ulrich ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

Compact sensor; Diamond probe; Objective lens; Optical microscope; Quartz tuning fork; SPM

Indexed keywords

CAPACITANCE; DIAMONDS; PROBES; QUARTZ; SENSORS; SURFACE PROPERTIES; TUNING;

CROSS-SECTIONAL ANALYSIS;

MICROSCOPES;

PROBE;

EID: 0346281216     PISSN: 09570233     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-0233/14/12/014     Document Type: Article

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