Aspects of scanning force microscope probes and their effects on dimensional measurement

Journal of Physics D: Applied Physics

Volumn 41, Issue 10, 2008, Pages

  Yacoot, Andrew ^a   Koenders, Ludger ^b  

^a NATIONAL PHYSICAL LABORATORY   (United Kingdom)

^b PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

MAGNETIC FORCE MICROSCOPY; MEASUREMENT THEORY; PARTICLE INTERACTIONS; SAMPLING;

DIMENSIONAL MEASUREMENTS; TIP-SAMPLE INTERACTIONS;

ATOMIC FORCE MICROSCOPY;

EID: 43049119325     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/41/10/103001     Document Type: Review

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