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Review of Scientific Instruments

Volumn 81, Issue 11, 2010, Pages

Comment on "MEMS-based high speed scanning probe microscopy" [Rev. Sci. Instrum. 81, 043702 (2010)]

(2) Degertekin, F Levent a Torun, Hamdi a

a GEORGIA INSTITUTE OF TECHNOLOGY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPES; HIGH SPEED IMAGING; HIGH SPEED SCANNING; MICRO ELECTRO MECHANICAL SYSTEM; MICROMACHINED; SCANNING TUNNELING MICROSCOPES; TOPOGRAPHIC IMAGES;

ACTUATORS; ELECTROSTATIC ACTUATORS; MEMS; MICROELECTROMECHANICAL DEVICES; MICROSCOPES; PROBES; SCANNING PROBE MICROSCOPY;

SCANNING;

EID: 78650282509 PISSN: 00346748 EISSN: None Source Type: Journal
DOI: 10.1063/1.3499232 Document Type: Review

Times cited : (2)

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