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Review of Scientific Instruments

Volumn 82, Issue 4, 2011, Pages

High speed nano-metrology

(6) Humphris, Andrew D L a Zhao, Bin a Catto, David a Howard Knight, Jeremy P b Kohli, Priyanka a Hobbs, Jamie K b

a Infinitesima Ltd (United Kingdom)

b UNIVERSITY OF SHEFFIELD (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ACCURATE MEASUREMENT; AFM; AFM TIP; CONVENTIONAL LASERS; FEED-BACK LOOP; FUNCTIONAL DEVICES; HEIGHT MEASUREMENT; IN-LINE; INDEPENDENT MEASUREMENT; LASER INTERFEROMETER; LATERAL MEASUREMENTS; NANOMETRES; NANOMETROLOGY; NEW APPROACHES; SPATIAL RESOLUTION; SURFACE HEIGHT; TIP-SAMPLE CONTACT; TIP-SAMPLE FORCES; TRUE HEIGHT;

ATOMIC FORCE MICROSCOPY; INTERFEROMETERS; LASER INTERFEROMETRY;

PRECISION ENGINEERING;

SILICON;

ARTICLE; ATOMIC FORCE MICROSCOPY; CALIBRATION; FINITE ELEMENT ANALYSIS; INSTRUMENTATION; METHODOLOGY; NANOTECHNOLOGY; SEMICONDUCTOR; TIME;

CALIBRATION; FINITE ELEMENT ANALYSIS; MICROSCOPY, ATOMIC FORCE; NANOTECHNOLOGY; SEMICONDUCTORS; SILICON; TIME FACTORS;

EID: 79955578828 PISSN: 00346748 EISSN: None Source Type: Journal
DOI: 10.1063/1.3584935 Document Type: Article

Times cited : (18)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.