Development of low noise cantilever deflection sensor for multienvironment frequency-modulation atomic force microscopy

Review of Scientific Instruments

Volumn 76, Issue 5, 2005, Pages

  Fukuma, Takeshi ^a   Kimura, Masayuki ^a   Kobayashi, Kei ^a   Matsushige, Kazumi ^a   Yamada, Hirofumi ^a  

^a KYOTO UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DEFLECTION SENSORS; FREQUENCY-MODULATION ATOMIC FORCE MICROSCOPY (FM-AFM); OPTICAL BEAM DEFLECTION (OBD); POLYDIACETYLENE SINGLE CRYSTALS;

ATOMIC FORCE MICROSCOPY; BROWNIAN MOVEMENT; FREQUENCY MODULATION; MICROSCOPES; PHOTODETECTORS; PHOTODIODES; POLYMERS; SIGNAL PROCESSING; SINGLE CRYSTALS; SPURIOUS SIGNAL NOISE; ULTRAHIGH VACUUM; VOLTAGE CONTROL;

SENSORS;

EID: 18744405727     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1896938     Document Type: Article

References (26)

1. T. R. Albrecht, P. Grütter, D. Horne, and D. Ruger, J. Appl. Phys. 69, 668 (1991).
2. F. J. Giessibl, Science 267, 68 (1995).
3. S. Kitamura and M. Iwatsuki, Jpn. J. Appl. Phys., Part 2 34, L1086 (1995).
4. S. Orisaka, T. Minobe, T. Uchihashi, Y. Sugawara, and S. Morita, Appl. Surf. Sci. 140, 243 (1999).
5. C. Loppacher, M. Bammerlin, M. Guggisberg, F. Battiston, R. Bennewitz, S. Rast, A. Baratoff, E. Meyer, and H.-J. Güntherodt, Appl. Surf. Sci. 140, 287 (1999).
6. M. Bammerlin, R. Lüthi, E. Meyer, A. Baratoff, J. Lü, M. Guggisberg, C. Gerber, L. Howald, and H.-J. Güntherodt, Probe Microsc. 1, 3 (1997).
7. K. Fukui, H. Onishi, and Y. Iwasawa, Chem. Phys. Lett. 280, 296 (1997).
8. G. Binnig, C. F. Quate, and C. Gerber, Phys. Rev. Lett. 56, 930 (1986).
9. Y. Martin, C. C. Williams, and H. K. Wickramasinghe, J. Appl. Phys. 61, 4723 (1987).
10. G. M. McClelland, R. Erlandsson, and S. Chiang, Review of Progress in Quantitative Non-Destructive Evaluation (Plenum, New York, 1988), Vol. 6B, pp. 1307-1314.
11. G. Meyer and N. M. Amer, Appl. Phys. Lett. 53, 1045 (1988).
12. C. Schönenberger and S. F. Alvarado, Rev. Sci. Instrum. 60, 3131 (1989).
13. G. Neubauer, S. R. Cohen, G. M. McClelland, D. Horne, and C. M. Mate, Rev. Sci. Instrum. 61, 2296 (1990).
14. M. Tortonese, H. Yamada, R. C. Barrett, and C. F. Quate, The Proceedings of Transducers '91 (IEEE, Pennington, NJ, 1991), pp. 448-451, publication No. 91 CH2817-5.
15. T. Itoh and T. Suga, Nanotechnology 4, 218 (1993).
16. D. Rugar, H. J. Mamin, R. Erlandsson, J. E. Stern, and B. D. Terris, Rev. Sci. Instrum. 59, 2337 (1988).
17. C. A. J. Putman, B. G. D. Grooth, N. F. V. Hulst, and J. Greve, J. Appl. Phys. 72, 6 (1992).
18. T. Fukuma, T. Ichii, K. Kobayashi, H. Yamada, and K. Matsushige, Appl. Phys. Lett. 86, 034103 (2005).
19. T. Fukuma, K. Kobayashi, K. Matsushige, and H. Yamada, Appl. Phys. Lett. (submitted).
20. D. Sarid, Scanning Force Microscopy with Applications to Electric, Magnetic and Atomic Forces (Oxford University Press, Oxford 1994).
21. M. Ojima, A. Arimoto, N. Chinone, T. Gotoh, and K. Aiki, Appl. Opt. 25, 1404 (1986).
22. A. Arimoto, M. Ojima, N. Chinone, A. Oishi, T. Gotoh, and N. Ohnuki, Appl. Opt. 25, 1398 (1986).
23. K. Kobayashi, H. Yamada, H. Itoh, T. Horiuchi, and K. Matsushige, Rev. Sci. Instrum. 72, 4383 (2001).
24. S. Kitamura and M. Iwatsuki, Appl. Phys. Lett. 72, 3154 (1998).
25. K. Kobayashi, H. Yamada, and K. Matsushige, Appl. Phys. Lett. 81, 2629 (2002).
26. V. D. Kobelt and E. F. Paulus, Acta Crystallogr., Sect. B: Struct. Crystallogr. Cryst. Chem. 30, 232 (1974).