Continuous measurement of atomic force microscope tip wear by contact resonance force microscopy

Small

Volumn 7, Issue 8, 2011, Pages 1018-1022

  Killgore, Jason P ^a   Geiss, Roy H ^a   Hurley, Donna C ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

atomic force microscopy; contact resonance force microscopy; mechanical properties; nanotribology; single asperity contacts

Indexed keywords

AFM; AFM TIP; ATOMIC FORCE MICROSCOPES; CONTACT RADIUS; CONTACT RESONANCE; CONTINUOUS MEASUREMENTS; FORCE MICROSCOPY; HIGH RESOLUTION; NANO-METER-SCALE; QUANTITATIVE MEASUREMENT; REAL-TIME INFORMATION; SILICON SUBSTRATES; SINGLE-ASPERITY CONTACTS; TIP WEAR; WEAR RATES;

ATOMIC FORCE MICROSCOPY; NANOTRIBOLOGY; RESONANCE;

MECHANICAL PROPERTIES;

SILICON;

ARTICLE; ATOMIC FORCE MICROSCOPY; CHEMISTRY; INSTRUMENTATION; METHODOLOGY;

MICROSCOPY, ATOMIC FORCE; SILICON;

EID: 79954457495     PISSN: 16136810     EISSN: 16136829     Source Type: Journal    
DOI: 10.1002/smll.201002116     Document Type: Article

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