Reconstruction of feature shape and dimension through data processing of sequenced various angle atomic force microscopy (AFM) scans

Measurement Science and Technology

Volumn 20, Issue 8, 2009, Pages

  Sikora, Andrzej ^a  

^a ELECTROTECHNICAL INSTITUTE   (Poland)

Author keywords

Atomic force microscopy; Data processing; Dimension and shape calculation; Multiple scan method

Indexed keywords

ATOMIC FORCE MICROSCOPY; DATA PROCESSING;

CONE ANGLE; FEATURE SHAPE; MICRO AND NANOSTRUCTURES; PRECISE MEASUREMENTS; RELIABLE METHODS; SCAN METHODS; TIP TILT;

DATA HANDLING;

EID: 70350651936     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/20/8/084016     Document Type: Article

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