Advances in scanning force microscopy for dimensional metrology

CIRP Annals - Manufacturing Technology

Volumn 55, Issue 2, 2006, Pages

  Danzebrink, H U ^a   Koenders, L ^a   Wilkening, G ^a   Yacoot, A ^b   Kunzmann, H ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

^b NATIONAL PHYSICAL LABORATORY   (United Kingdom)

Author keywords

Dimensional; Metrology; Scanning probe microscope

Indexed keywords

CALIBRATION; MEASUREMENT; SCANNING PROBE MICROSCOPY; SCANNING TUNNELING MICROSCOPY; UNCERTAINTY ANALYSIS;

CALIBRATION PROCEDURE; DIMENSIONAL; DIMENSIONAL METROLOGY; INSTRUMENT DESIGNS; MEASUREMENT UNCERTAINTY; NATIONAL METROLOGY INSTITUTES; STATE OF THE ART;

SCANNING;

EID: 43049112279     PISSN: 00078506     EISSN: 17260604     Source Type: Journal    
DOI: 10.1016/j.cirp.2006.10.010     Document Type: Article

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