SCOPUS 정보 검색 플랫폼

Volumn 81, Issue 4, 2010, Pages

MEMS-based high speed scanning probe microscopy

(7) Disseldorp, E C M a Tabak, F C a Katan, A J a,b Hesselberth, M B S a Oosterkamp, T H a Frenken, J W M a Van Spengen, W M a,c

a LEIDEN UNIVERSITY (Netherlands)

b LAWRENCE BERKELEY NATIONAL LABORATORY (United States)

c Falco Systems (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPES; DYNAMIC PROCESS; FUNDAMENTAL RESONANCE FREQUENCY; HIGH SPEED SCANNING; HIGH-SPEED; HIGH-SPEED PERFORMANCE; MEMS SCANNER; MICROELECTROMECHANICAL SYSTEMS; OUT-OF-PLANE; SCANNING PROBE MICROSCOPE; SCANNING TUNNELING MICROSCOPES; TIP SPEED;

COMPOSITE MICROMECHANICS; ELECTROSTATIC ACTUATORS; MEMS; MICROELECTROMECHANICAL DEVICES; MICROSCOPES; NATURAL FREQUENCIES; PROBES; SCANNING PROBE MICROSCOPY; SPEED;

SCANNING;

ARTICLE; ATOMIC FORCE MICROSCOPY; COMPUTER SIMULATION; EQUIPMENT DESIGN; FEEDBACK SYSTEM; FINITE ELEMENT ANALYSIS; INSTRUMENTATION; MICROELECTROMECHANICAL SYSTEM; MOTION; SCANNING ELECTRON MICROSCOPY; SCANNING PROBE MICROSCOPY; SCANNING TUNNELING MICROSCOPY; TIME;

COMPUTER SIMULATION; EQUIPMENT DESIGN; FEEDBACK; FINITE ELEMENT ANALYSIS; MICRO-ELECTRICAL-MECHANICAL SYSTEMS; MICROSCOPY, ATOMIC FORCE; MICROSCOPY, ELECTRON, SCANNING; MICROSCOPY, SCANNING PROBE; MICROSCOPY, SCANNING TUNNELING; MOTION; TIME FACTORS;

EID: 77952417222 PISSN: 00346748 EISSN: None Source Type: Journal
DOI: 10.1063/1.3361215 Document Type: Article

Times cited : (28)

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