Algorithms for calculating single-atom step heights

Nanotechnology

Volumn 10, Issue 4, 1999, Pages 428-433

  Fu, Joseph ^a   Tsai, Vincent ^a   Köning, Rainer ^a   Dixson, Ronald ^a   Vorburger, Theodore ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; CRYSTAL ATOMIC STRUCTURE; CRYSTAL ORIENTATION; DISTANCE MEASUREMENT; NANOTECHNOLOGY;

SINGLE ATOM STEP HEIGHTS;

SILICON;

EID: 0033340468     PISSN: 09574484     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-4484/10/4/312     Document Type: Article

References (6)

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4. Boas M 1966 Mathematical Methods in the Physical Sciences (New York: Wiley)
5. Suzuki M et al 1996 J. Vac. Sci. Technol. A 14 1228
6. Seiler D G, Diebold A C, Bullis W M, Shaffner T J, McDonald R and Walters E J (ed) 1998 Characterization and Metrology for ULSI Technology (AIP Conf. Proc. vol 449) (New York: AIP) p 839