Investigation of the cantilever response of non-contact atomic force microscopy for topography measurements in all three dimensions

Measurement Science and Technology

Volumn 22, Issue 9, 2011, Pages

  Häler Grohne, Wolfgang ^a   Hüser, Dorothee ^a   Dai, Gaoliang ^a   Köning, Rainer ^a   Bosse, Harald ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

bifurcation; cantilever response; dynamic force microscopy; high aspect ratio nanostructure; non contact atomic force microscopy; tipsample interaction

Indexed keywords

ASPECT RATIO; ATOMIC FORCE MICROSCOPY; BIFURCATION (MATHEMATICS); GEOMETRY; PROBES; SCANNING ELECTRON MICROSCOPY; TOPOGRAPHY;

CANTILEVER RESPONSE; DYNAMIC FORCE MICROSCOPY; HIGH ASPECT RATIO NANO-STRUCTURES; NONCONTACT ATOMIC FORCE MICROSCOPY; TIP-SAMPLE INTERACTION;

NANOCANTILEVERS;

EID: 80051703256     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/22/9/094006     Document Type: Article

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