The interference effect in an optical beam deflection detection system of a dynamic mode AFM

Measurement Science and Technology

Volumn 17, Issue 6, 2006, Pages 1417-1423

  Huang, Qiang Xian ^a,b   Fei, Ye Tai ^a   Gonda, Satoshi ^b   Misumi, Ichiko ^b   Sato, Osamu ^b   Keem, Taeho ^b   Kurosawa, Tomizo ^b  

^a HEFEI UNIVERSITY OF TECHNOLOGY   (China)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Clocked generator; Compensation; Lead resistance; Remote variable resistive sensors; SHC; SPC; Switching networks

Indexed keywords

ATOMIC FORCE MICROSCOPY; DIFFRACTION GRATINGS; LASER BEAMS; LIGHT INTERFERENCE; NUMERICAL ANALYSIS; SWITCHING NETWORKS;

CLOCKED GENERATOR; COMPENSATION; LEAD RESISTANCE; REMOTE VARIABLE RESISTIVE SENSORS; SHC; SPC;

OPTICAL BEAM SPLITTERS;

ATOMIC FORCE MICROSCOPY; DIFFRACTION GRATINGS; LASER BEAMS; LIGHT INTERFERENCE; NUMERICAL ANALYSIS; OPTICAL BEAM SPLITTERS; SWITCHING NETWORKS;

EID: 33646856824     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/17/6/020     Document Type: Conference Paper

References (20)

1. Binnig G, Quate C F and Gerber Ch 1986 Atomic force microscope Phys. Rev. Lett. 56 930-3
2. Alexander S et al 1989 An atomic-resolution atomic-force microscope implemented using an optical lever J. Appl. Phys. 65 164-7
3. Garcia R and Perez R 2002 Dynamic atomic force microscopy methods Surf. Sci. Rep. 47 197-301
4. Meyer G and Amer N M 1988 Novel optical approach to atomic force microscopy Appl. Phys. Lett. 53 1045-7
5. Erlandsson R, McClelland G M, Mate C M and Chiang S 1988 Atomic force microscopy using optical interferometry J. Vac. Sci. Technol. A 6 266-70
6. Martin Y, Williams C C and Wickramasinghe H K 1987 Atomic force microscope-force mapping and profiling on a sub 100- scale J. Appl. Phys. 61 4723-9
7. Huh G H, Kopanski J J, Marchiando J F, Birdwell A G and Kuk Y 2003 Factors influencing the capacitance-voltage characteristics measured by scanning capacitance microscope J. Appl. Phys. 94 2680-5
8. Mendez-Vilas A, Gonzalez-Martin M L and Nuevo M J 2002 Optical interference artifacts in contact atomic force microscopy images Ultramicroscopy 92 243-50
9. Mendez-Vilas A, Gonzalez-Martin M L, Labajos-Broncano L and Nuevo M J 2004 Artifacts in AFM images revealed using friction maps Appl. Surf. Sci. 238 42-6
10. Kassies R, Werf K O, Bennink M L and Otto C 2004 Removing interference and optical feedback artifacts in atomic force microscopy measurements by application of high frequency laser current modulation Rev. Sci. Instrum. 75 689-93
11. Edwards H et al 1998 Influence of data analysis and other factors on the short-term stability of vertical scanning-probe microscope calibration measurements J. Vac. Sci. Technol. B 16 633-44
12. Burnham N A et al 2003 Comparison of calibration methods for atomic-force microscopy cantilevers Nanotechnology 14 1-6
13. Gonda S, Doi T, Kurosawa T, Tanimura Y, Hisata N, Yamagishi Y, Fujimoto H and Yukawa H 1999 Real-time, interferometrically measuring atomic force microscope for direct calibration of standards Rev. Sci. Instrum. 70 3362-8
14. st Internal Symp. on Standard Materials and Metrology for Nanotechnology, Tokyo, Japan pp 87-93
15. Hoummady M and Farnault E 1998 Enhanced sensitivity to force gradients by using higher flexural modes of the atomic force microscope cantilever Appl. Phys. A 66 S361-4
16. Misumi I, Gonda S, Kurosawa T and Takamasu K 2003 Uncertainty in pitch measurements of one-dimensional grating standards using a nanometrological atomic force microscope Meas. Sci. Technol. 14 463-71
17. Garnaes J et al 2003 Calibration of step heights and roughness measurements with atomic force microscopes Precis. Eng. 27 91-8
18. Meli F 2000 Final report of WGDM-7: Preliminary comparison on nanometrology according to the rules of CCL key comparisons Nano4: 1D gratings (Wabern)
19. Huang Q X, Gonda S, Misumi I, Sato O, Keem T and Kurosawa T 2006 Nonlinear and hysteretic influence of piezoelectric actuators in AFMs on lateral dimension measurement Sensors Actuators A 125 590-6
20. Mizuno F, Misumi I, Gonda S and Kurosawa T 2004 Impacts of probe-tip tilt on scanning probe microscopy J. Vac. Sci. Technol. B 22 3394-8