Nanoscale surface measurements at sidewalls of nano- and micro-structures

Measurement Science and Technology

Volumn 18, Issue 2, 2007, Pages 334-341

  Dai, Gaoliang ^a   Wolff, Helmut ^a   Weimann, Thomas ^a   Xu, Min ^a   Pohlenz, Frank ^a   Danzebrink, Hans Ulrich ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

Atomic force microscopy; Line edge roughness; Micro coordinate measuring machine; Micro assembling; Nano and micro structures; Probe; Sidewalls

Indexed keywords

ACOUSTIC NOISE; ATOMIC FORCE MICROSCOPY; COORDINATE MEASURING MACHINES; MICROSTRUCTURE; SUBSTRATES;

LINE EDGE ROUGHNESS; MICRO COORDINATE MEASURING MACHINE; MICRO-ASSEMBLING; MICROTRENCHES;

SURFACE ANALYSIS;

ACOUSTIC NOISE; ATOMIC FORCE MICROSCOPY; COORDINATE MEASURING MACHINES; MICROSTRUCTURE; SUBSTRATES; SURFACE ANALYSIS;

EID: 34247195636     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/18/2/S03     Document Type: Conference Paper

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