Real-time, interferometrically measuring atomic force microscope for direct calibration of standards

Review of Scientific Instruments

Volumn 70, Issue 8, 1999, Pages 3362-3368

  Gonda, S ^a   Doi, T ^a   Kurosawa, T ^a   Tanimura, Y ^a   Hisata, N ^b   Yamagishi, T ^b   Fujimoto, H ^b   Yukawa, H ^b  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b OLYMPUS CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000856658     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1149920     Document Type: Article

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