Piezoresistive and self-actuated 128-cantilever arrays for nanotechnology applications

Microelectronic Engineering

Volumn 84, Issue 5-8, 2007, Pages 1260-1264

  Rangelow, I W ^a   Ivanov, Tzv ^a   Ivanova, K ^a   Volland, B E ^a   Grabiec, P ^a   Sarov, Y ^b   Persaud, A ^b   Gotszalk, T ^c   Zawierucha, P ^c   Zielony, M ^c   Dontzov, D ^d   Schmidt, B ^e   Zier, M ^e   Nikolov, N ^f   Kostic, I ^g   Engl, W ^h   Sulzbach, T ^h   Mielczarski, J ⁱ   Kolb, S ^j   Latimier, Du P ^k   Pedreau, R ^k   Djakov, V ^l   Huq, S E ^l   Edinger, K ^m   Fortagne, O ⁿ   Almansa, A ^o   Blom, H O ^p   more..

^a ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

^b UNIVERSITY OF KASSEL   (Germany)

^c WROCLAW UNIVERSITY OF TECHNOLOGY   (Poland)

^d SIOS Messtechnik GmbH   (Germany)

^e INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

^f Microsystems Ltd   (Bulgaria)

^g INSTITUTE OF CHEMISTRY   (Slovakia)

^h NANOWORLD SERVICES GMBH   (Germany)

ⁱ UNIVERSITÉ DE LORRAINE   (France)

^j INFINEON TECHNOLOGIES AG   (Germany)

^k ID MOS   (France)

^l RUTHERFORD APPLETON LABORATORY   (United Kingdom)

^m NaWoTec GmbH   (Germany)

ⁿ Vistec Electron Beam GmbH   (Germany)

^o ARC SEIBERSDORF RESEARCH GMBH   (Austria)

^p UPPSALA UNIVERSITY   (Sweden)

more..

Author keywords

Cantilever arrays; Piezoresistive micro cantilever; Self actuated micro cantilever

Indexed keywords

CHIP SCALE PACKAGES; COMPUTER SOFTWARE; NEMS; PIEZOELECTRIC ACTUATORS; PROBES; VLSI CIRCUITS;

CANTILEVER ARRAYS; PIEZORESISTIVE MICROCANTILEVER; SCANNING PROXIMITY PROBES; SELF ACTUATED MICROCANTILEVER;

NANOTECHNOLOGY;

EID: 34247897140     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2007.01.219     Document Type: Article

References (12)

1. Young R., Ward J., and Scire F. Rev. Sci. Instrum. 43 (1972) 99
2. Binnig G., Rohrer H., Gerber Ch., and Weibel E. Phys. Rev. Lett. 49 (1982) 57
3. Binnig G., and Rohrer H. IBM J. Res. Dev. 30 (1986) 4
4. Fantner G.E., et al. Ultramicroscopy 106 (2006) 881
5. Pedrak R., et al. J. Vac. Sci. Technol. B 21 (2003) 3102
6. Smith C.S. Phys. Rev. 94 (1954) 42
7. Herring C., and Vogt E. Phys. Rev. 101 (1956) 944
8. Ivanov Tzv., Gotszalk T., Sulzbach T., and Rangelow I.W. Ultramicroscopy 97 (2003) 377
9. Ivanov Tzv., Gotszalk T., Sulzbach T., Chakarov I., and Rangelow I.W. Microelectron. Eng. 67-68 (2003) 534
10. Rangelow I.W., et al. Proc. SPIE 2879 (1996) 56
11. .
12. NT-MDT SPM accessories TQ1 silicon calibration grating, .