Self-sensing and self-actuating probe based on quartz tuning fork combined with microfabricated cantilever for dynamic mode atomic force microscopy

Applied Surface Science

Volumn 210, Issue 1-2 SPEC., 2003, Pages 18-21

  Akiyama, T ^a   Staufer, U ^a   De Rooij, N F ^a  

^a UNIVERSITY OF NEUCHÂTEL   (Switzerland)

Author keywords

AFM; Cantilever; Dynamic mode; Microfabrication; Tuning fork

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELECTROCHEMISTRY; FABRICATION; OSCILLATIONS; PROBES; SILICON; WIRE;

MICROFABRICATION; SCANNING PROBE MICROSCOPES (SPM);

MICROSCOPES;

EID: 0037474577     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(02)01471-X     Document Type: Conference Paper

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