Modelling and investigation of the mechanical and electrical characteristics of the silicon 3D-boss microprobe for force and deflection measurements

Journal of Micromechanics and Microengineering

Volumn 16, Issue 7, 2006, Pages 1116-1127

  Nesterov, Vladimir ^a   Brand, Uwe ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTATIONAL COMPLEXITY; DEFORMATION; OPTIMIZATION; RESISTORS; SENSITIVITY ANALYSIS; SENSORS; SILICON; STIFFNESS; STRETCHING; TRANSDUCERS;

3D MICROPROBE INVESTIGATION; HOOGE CONSTANT; NONLINEAR MECHANICAL CHARACTERISTICS; WHEATSTONE BRIDGE TRANSDUCERS;

MICROELECTROMECHANICAL DEVICES;

EID: 33745058702     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/16/7/003     Document Type: Article

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