A metrological Scanning Probe Microscope based on a quartz tuning fork detector

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 8036, Issue , 2011, Pages

  Babic, Bakir ^a   Freund, Christopher H ^a   Lawn, Malcolm ^a   Miles, John R ^a   Jan, Herrmann ^a  

^a NATIONAL MEASUREMENT INSTITUTE   (Australia)

Author keywords

AFM; Frequency modulation; mSPM; Non contact mode; PLL; Quartz tuning fork

Indexed keywords

AFM; AUSTRALIA; DIMENSIONAL MEASUREMENTS; KEY COMPONENT; MEASUREMENT VOLUME; MSPM; NANOMETRES; NANOMETROLOGY; NANOPOSITIONING STAGE; NATIONAL MEASUREMENT INSTITUTE; NON-CONTACT MODE; QUARTZ TUNING FORK; SCANNING PROBE MICROSCOPE;

ATOMIC FORCE MICROSCOPY; DESIGN; DETECTORS; POSITION MEASUREMENT; PROBES; QUARTZ; SECURITY SYSTEMS; UNCERTAINTY ANALYSIS;

SCANNING;

EID: 79960414954     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.884567     Document Type: Conference Paper

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