SI-traceable determination of spring constants of various atomic force microscope cantilevers with a small uncertainty of 1%

Measurement Science and Technology

Volumn 18, Issue 11, 2007, Pages 3351-3358

  Kim, Min Seok ^a   Choi, Jae Hyuk ^a   Kim, Jong Ho ^a   Park, Yon Kyu ^a  

^a Korea Research Institute of Standards and Science   (South Korea)

Author keywords

Atomic force microscopy; Calibration; Cantilever balance; Micronewton nanonewton force; Spring constant

Indexed keywords

ATOMIC FORCE MICROSCOPY; CALIBRATION; SPRINGS (COMPONENTS); UNCERTAINTY ANALYSIS;

CANTILEVER BALANCE; MICRONEWTON/NANONEWTON FORCE; SPRING CONSTANT;

CANTILEVER BEAMS;

ATOMIC FORCE MICROSCOPY; CALIBRATION; CANTILEVER BEAMS; SPRINGS (COMPONENTS); UNCERTAINTY ANALYSIS;

EID: 36248972139     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/18/11/014     Document Type: Article

References (28)

1. Alessandrini A and Facci P 2005 Meas. Sci. Technol. 16 R65
2. Kim S-H and Boyd J G 2006 Meas. Sci. Technol. 17 2343
3. Serre C, Pérez-Rodríguez A, Morante J R, Gorostiza P and Esteve J 1999 Sensors Actuators A 74 134
4. Morel N, Ramonda M and Tordjeman Ph 2005 Appl. Phys. Lett. 86 163103
5. Willemsen C H, Snel M M E, Cambi A, Greve J, De Grooth B G and Figdor C G 2000 Biophys. J. 79 3267
6. Cook S M, Schäffer T E, Chynoweth K M, Wigton M, Simmonds R W and Lang K M 2006 Nanotechnology 17 2135
7. Lévy R and Maaloum M 2002 Nanotechnology 13 33
8. Gibson C T, Watson G S and Myhra S 1996 Nanotechnology 7 259
9. Cumpson P J and Hedley J 2003 Nanotechnology 14 1279
10. Cumpson P J, Hedley J and Zhdan P 2003 Nanotechnology 14 918
11. Clifford C A and Seah M P 2005 Nanotechnology 16 1666
12. Gibson C T, Smith D A and Roberts C J 2005 Nanotechnology 16 234
13. Burnham N A, Chen X, Hodges C S, Matei G A, Thoreson E J, Roberts C J, Davies M C and Tendler S J B 2003 Nanotechnology 14 1
14. Pratt J R, Kramar J A, Newell D B and Smith D T 2005 Meas. Sci. Technol. 16 2129
15. Matei G A, Thoreson E J, Pratt J R, Newell D B and Burnham N A 2006 Rev. Sci. Instrum. 77 083703
16. Gates R S and Pratt J R 2006 Meas. Sci. Technol. 17 2852
17. Cumpson P J, Clifford C A and Hedley J 2004 Meas. Sci. Technol. 15 1337
18. Leach R, Chetwynd D, Blunt L, Haycocks J, Harris P, Jackson K, Oldfield S and Reilly S 2006 Meas. Sci. Technol. 17 467
19. Behrens I, Doering L and Peiner E 2003 J. Micromech. Microeng. 13 S171
20. Nesterov V and Brand U 2006 J. Micromech. Microeng. 16 1116
21. Brand U and Doering L 2006 Proc. 6th Euspen Int. Conf. (May 2006, Baden bei Wien) p 192
22. Nesterov V 2007 Meas. Sci. Technol. 18 360
23. Kim M-S, Choi J-H, Park Y-K and Kim J-H 2006 Metrologia 43 389
24. Lee H-J, Kim J-H, Cho K, Kang J-Y, Baek C-W and Kim J-M 2006 Int. J. Mod. Phys. B 20 3781
25. Torii A, Sasaki M, Hane K and Okuma S 1996 Meas. Sci. Technol. 7 179
26. Tortonese M and Kirk M 1997 Proc. SPIE (1997, San Jose, CA) vol 3009 p 53
27. BIPM, IEC, IFCC, ISO, IUPAC, IUPAP and OIML 1995 Guide to the Expression of Uncertainty in Measurement 2nd edn (Geneva: International Standards Organization)
28. Kochsiek M and Gläser M 2000 Comprehensive Mass Metrology 1st edn (Berlin: Wiley-VCH)