Development of a metrological atomic force microscope with minimized Abbe error and differential interferometer-based real-time position control

Measurement Science and Technology

Volumn 22, Issue 9, 2011, Pages

  Ducourtieux, Sebastien ^a   Poyet, Benoit ^a  

^a LABORATOIRE NATIONAL DE MÉTROLOGIE ET D ESSAIS LNE   (France)

Author keywords

Abbe error free; differential laser interferometer; dimensional nanometrology; metrological atomic force microscope (mAFM)

Indexed keywords

ATOMIC FORCE MICROSCOPY; CONTROLLERS; ERRORS; INTERFEROMETERS; LASER INTERFEROMETRY; MICROSCOPES; POSITION CONTROL; REAL TIME CONTROL; UNCERTAINTY ANALYSIS;

ABBE ERRORS; DIFFERENTIAL INTERFEROMETERS; DIMENSIONAL MEASUREMENTS; DIMENSIONAL NANOMETROLOGY; LASER DIFFERENTIAL INTERFEROMETERS; LASER INTERFEROMETER; METROLOGICAL ATOMIC FORCE MICROSCOPE; THERMAL DILATATION;

INSTRUMENT ERRORS;

EID: 80051686203     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/22/9/094010     Document Type: Article

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