Measuring the cantilever-position-sensitive detector distance and cantilever curvature for cantilever sensor applications

Review of Scientific Instruments

Volumn 80, Issue 9, 2009, Pages

  Xu, Meng ^a   Tian, Ye ^a   Coates, M L ^a   Beaulieu, L Y ^a  

^a MEMORIAL UNIVERSITY OF NEWFOUNDLAND   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM BLOCK; AMPLIFICATION FACTORS; CANTILEVER SENSORS; CHARACTERIZATION METHODS; INITIAL ANGLE; INITIAL CURVATURE; INITIAL DISTANCE; INITIAL STATE; OPTICAL BEAM DEFLECTION; POSITION-SENSITIVE DETECTORS; REFLECTED BEAM; SENSING PLATFORMS; SURFACE NORMALS;

ALUMINA; AMPLIFICATION; ATOMIC FORCE MICROSCOPY; OPTICAL SENSORS; POWER SPECTRAL DENSITY; PULSE SHAPING CIRCUITS;

NANOCANTILEVERS;

EID: 70349671388     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3233918     Document Type: Article

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