Towards quantitative determination of the spring constant of a scanning force microscope cantilever with a microelectromechanical nano-force actuator

Measurement Science and Technology

Volumn 21, Issue 1, 2010, Pages

  Gao, Sai ^a   Zhang, Zhikai ^b   Wu, Yong ^c   Herrmann, Konrad ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

^b OSTFALIA UNIVERSITY OF APPLIED SCIENCES   (Germany)

^c TIANJIN UNIVERSITY   (China)

Author keywords

Calibration; Cantilever; Microelectromechanical nanoforce actuator; Scanning force microscope; Spring constant

Indexed keywords

ACTUATORS; ATOMIC FORCE MICROSCOPY; BIOLOGICAL MATERIALS; BIOMECHANICS; MICROSCOPES; NANOCANTILEVERS; SCANNING; SPRINGS (COMPONENTS); STIFFNESS;

BIOLOGICAL STRUCTURES; CALIBRATION PROCEDURE; CANTILEVER; LARGE DISPLACEMENTS; MECHANICAL PROPERTIES OF MATERIALS; MICRO-ELECTRO-MECHANICAL; QUANTITATIVE DETERMINATIONS; SPRING CONSTANTS;

CALIBRATION;

EID: 77950218737     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/21/1/015103     Document Type: Article

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