Metrological Scanning Probe Microscopes - Instruments for Dimensional Nanometrology

Nanoscale Calibration Standards and Methods: Dimensional and Related Measurements in the Micro-and Nanometer Range

Volumn , Issue , 2006, Pages 1-21

  Danzebrink, Hans Ulrich ^a   Pohlenz, Frank ^a   Dai, Gaoliang ^a   Dal Savio, Claudio ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

Dimensional nanometrology; High resolution probing systems; Instrumentation; Methods; Metrological scanning probe microscopes; Nanoscale calibration standards

Indexed keywords

EID: 84889626790     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1002/3527606661.ch1     Document Type: Chapter

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