Accurate and traceable calibration of two-dimensional gratings

Measurement Science and Technology

Volumn 18, Issue 2, 2007, Pages 415-421

  Dai, Gaoliang ^a   Pohlenz, Frank ^a   Dziomba, Thorsten ^a   Xu, Min ^a   Diener, Alexander ^a   Koenders, Ludger ^a   Danzebrink, Hans Ulrich ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

2D grating; Calibration; Nanometrology; Pitch; Scanning force microscope; Traceability

Indexed keywords

ATOMIC FORCE MICROSCOPY; CALIBRATION; DATA REDUCTION; DIFFRACTOMETERS; MEASUREMENT THEORY;

DATA EVALUATION; MEASUREMENT STRATEGY; MEASUREMENT TIME;

DIFFRACTION GRATINGS;

ATOMIC FORCE MICROSCOPY; CALIBRATION; DATA REDUCTION; DIFFRACTION GRATINGS; DIFFRACTOMETERS; MEASUREMENT THEORY;

EID: 34247218685     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/18/2/S13     Document Type: Conference Paper

References (27)

1. Schneir J, McWaid T H, Alexander J and Wilfley B P 1994 Design of an atomic force microscope with interferometric position control J. Vac. Sci. Technol. B 12 3561-6
2. Jusko O, Zhao X and Wilkening G 1994 Scanning probe microscopy as measuring means for micro and nanostructures Tech. Mess. 61 376-81 (in German)
3. Meli F and Thalmann R 1998 Long-range AFM profiler used for accurate pitch measurements Meas. Sci. Technol. 9 1087-92
4. Bienias M, Gao S, Hasche K, Seemann R and Thiele K 1998 A metrological scanning force microscope used for coating thickness and other topographical measurements Appl. Phys. A 66 S837-42
5. Picotto G B and Pisani M 2001 A sample scanning system with nanometric accuracy for quantitative SFM measurements Ultramicroscopy 86 247-54
6. Gonda S, Doi T, Kurosawa T, Tanimura Y, Hisata N, Yamagishi T, Fujimoto H and Yukawa H 1999 Real-time, interferometrically measuring atomic force microscope for direct calibration of standards Rev. Sci. Instrum. 70 3362-8
7. Haycocks J and Jackson K 2005 Traceable calibration of transfer standards for scanning probe microscopy Precis. Eng. 29 168-75
8. Koops K R and Dirscherl K 2002 Nanometrology standards in The Netherlands: the traceable scanning probe microscope Proc. 3rd Euspen Conf. (Eindhoven, The Netherlands) pp 525-8
9. Dai G et al 2004 Improving the performance of interferometers in metrological scanning probe microscopes Meas. Sci. Technol. 15 444-50
10. Dai G et al 2004 Metrological large range scanning probe microscope Rev. Sci. Instrum. 75 962-9
11. Häler-Grohne W and Bosse H 1998 Electron optical metrology system for pattern placement measurements Meas. Sci. Technol. 9 1120-8
12. EU contract no SMT-CT95-2018 2000 Transfer Standards for Calibration of Scanning Probe Microscopes
13. Nanoworld Co. http://www.nanoworld.com
14. NT-MDT Co. http://www.ntmdt.ru
15. VLSI Inc. http://www.vlsistandards.com
16. Jørgensen J F, Jensen C P and Garnæs J 1998 Lateral metrology using scanning probe microscopes, 2D pitch standards and image processing Appl. Phys. A 66 S847-52
17. Koenders L et al 2003 Comparison on nanometrology: nano 2-step height Metrologia 40 Tech. Suppl. 04001
18. Meli F 2001 International comparison in the field of nanometrology: pitch of 1D gratings (nano4) Proc. Euspen Int. Conf. (Turin, Italy, May 2001) pp 358-61
19. Misumi I, Gonda S, Huang Q and Keem T 2005 Sub-hundred nanometre pitch measurements using an AFM with differential laser interferometers for designing usable lateral scales Meas. Sci. Technol. 16 2080-90
20. Misumi I et al 2003 Submicrometre-pitch intercomparison between optical diffraction, scanning electron microscope and atomic force microscope Meas. Sci. Technol. 14 2065-74
21. Misumi I, Gonda S, Kurosawa T and Takamasu K 2003 Uncertainty in pitch measurements of one-dimensional grating standards using a nanometrological atomic force microscope Meas. Sci. Technol. 14 463-71
22. Dai G et al 2005 Accurate and traceable calibration of one-dimensional gratings Meas. Sci. Technol. 16 1241-9
23. Garnaes J 2005 Technical protocol for NANO5-comparison of two-dimensional nanometre scale gratings
24. Garnaes J et al 1998 Two-dimensional nanometer-scale calibration based on one-dimensional gratings Appl. Phys. A 66 S831-5
25. Kramar J A 2005 Nanometre resolution metrology with the molecular measuring machine Meas. Sci. Technol. 16 2121-8
26. SIOS Co. http://www.sios.de
27. NT-MDT Co. http://www.ntmdt.ru