Metrological atomic force microscope with self-sensing measuring head

Sensors and Actuators, A: Physical

Volumn 167, Issue 2, 2011, Pages 267-272

  Zhao, Jian ^a   Guo, Tong ^a   Ma, Long ^a   Fu, Xing ^a   Hu, Xiaotang ^a  

^a TIANJIN UNIVERSITY   (China)

Author keywords

Atomic force microscope; Compact measuring head; Frequency modulation; Metrology; Self sensing probe

Indexed keywords

AFM; ATOMIC FORCE MICROSCOPES; COMPACT MEASURING HEAD; DIMENSIONAL MEASUREMENTS; MEASUREMENT SPEED; MEASURING METHOD; METROLOGICAL ATOMIC FORCE MICROSCOPE; METROLOGY; MICRO-NANO; NANOMETER LEVEL; ONE-DIMENSIONAL GRATINGS; OPTICAL DETECTORS; POSITIONING STAGE; RESONANT FREQUENCIES; SELF-SENSING; SELF-SENSING PROBE; SERVO CONTROL SYSTEMS; TAPPING MODES; THREE-DIMENSIONAL MEASUREMENTS; WORKING SPACE; Z-DIRECTIONS;

FREQUENCY MODULATION; MEASUREMENTS; MICROSCOPES; NATURAL FREQUENCIES; PRECISION ENGINEERING; PROBES; SIGNAL PROCESSING;

ATOMIC FORCE MICROSCOPY;

EID: 79955912599     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2011.01.029     Document Type: Article

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