Traceable calibration of critical-dimension atomic force microscope linewidth measurements with nanometer uncertainty

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 23, Issue 6, 2005, Pages 3028-3032

  Dixson, R G ^a   Allen, R A ^a   Guthrie, W F ^a   Cresswell, M W ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRITICAL DIMENSION (CD); HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY (HRTEM); METROLOGY TOOLS; SEMICONDUCTOR MANUFACTURING;

COMPARATOR CIRCUITS; HIGH RESOLUTION ELECTRON MICROSCOPY; PROCESS CONTROL; SEMICONDUCTOR DEVICE MANUFACTURE; SILICON; SINGLE CRYSTALS; TRANSMISSION ELECTRON MICROSCOPY;

ATOMIC FORCE MICROSCOPY;

EID: 29044449761     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2130347     Document Type: Article

References (10)

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3. R. Dixson, A. Guerry, M. Bennett, T. Vorburger, and B. Bunday, Proc. SPIE 5038, 150 (2003).
4. R. Dixson, A. Guerry, M. Bennett, T. Vorburger, and M. Postek, Proc. SPIE 4689, 313 (2002).
5. Guide to the Expression of Uncertainty in Measurement (International Organization for Standardization, Geneva, Switzerland, 1995).
6. B. N. Taylor and C. E. Kuyatt, NIST Tech. Note 1297 (1994).
7. M. W. Cresswell, R. G. Dixson, W. F. Guthrie, R. A. Allen, C. E. Murabito, B. Park, J. V. Martinez, and A. Hunt, Proc. SPIE 5752 (to be published).
8. R. A. Allen, M. W. Cresswell, C. E. Murabito, R. G. Dixson, and E. H. Bogardus, AIP Conf. Proc. 683, 421 (2003).
9. M. W. Cresswell, E. H. Bogardus, J. V. Martinez de Pinillos, M. H. Bennett, R. A. Allen, W. F. Guthrie, C. E. Murabito, B. A. am Ende, and L. W. Linholm, Proc. SPIE 4689, 116 (2002).
10. R. A. Allen, A. Hunt, C. E. Murabito, B. Park, W. F. Guthrie, and M. W. Cresswell, " Extraction of critical dimension reference feature CDs from new test structure using HRTEM imaging., " Proceedings of 2005 International Conference on Microelectronic Test Structures, 2005 (to bepublished).