Advanced three-dimensional scan methods in the nanopositioning and nanomeasuring machine

Measurement Science and Technology

Volumn 20, Issue 8, 2009, Pages

  Hausotte, T ^a   Percle, B ^a   Jager G ^a  

^a ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

Coordinate measurement; Free form scan; Micro CMM; Nano CMM; Nanomeasuring machine; Scanning probe microscopy

Indexed keywords

PRECISION ENGINEERING; SCANNING PROBE MICROSCOPY; SCANNING TUNNELING MICROSCOPY; SURFACE MEASUREMENT;

COORDINATE MEASUREMENTS; FREEFORMS; MICRO-CMM; NANO-CMM; NANOMEASURING;

COORDINATE MEASURING MACHINES;

EID: 70350697798     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/20/8/084004     Document Type: Article

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