A long-range scanning probe microscope for automotive reflector optical quality inspection

Measurement Science and Technology

Volumn 22, Issue 9, 2011, Pages

  Klapetek, P ^a   Valtr, M ^a   Matula, M ^b  

^a CZECH METROLOGY INSTITUTE   (Czech Republic)

^b Visteon Autopal   (Czech Republic)

Author keywords

atomic force microscopy; measurement uncertainty

Indexed keywords

ATOMIC FORCE MICROSCOPY; FEEDBACK; INTERFEROMETERS; PIEZOELECTRIC CERAMICS; RANGE FINDERS; ROLLER BEARINGS; UNCERTAINTY ANALYSIS; UNITS OF MEASUREMENT;

BEARING MECHANISMS; LARGE-SCALE MEASUREMENT; MEASUREMENT UNCERTAINTY; OPTICAL QUALITIES; OPTICAL QUALITY INSPECTIONS; PIEZO-CERAMIC ACTUATORS; PIEZOCERAMIC COMPONENTS; POSITIONING SYSTEM;

SURFACE DEFECTS;

EID: 80051703948     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/22/9/094011     Document Type: Article

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