Calibrated scanning force microscope with capabilities in the subnanometre range

Surface and Interface Analysis

Volumn 33, Issue 2, 2002, Pages 71-74

  Hasche, K ^a   Herrmann, K ^a   Mirand, W ^b   Seemann, R ^b   Vitushkin, L ^b   Xu, M ^c   Yu, G ^d  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

^b PAVILLON DE BRETEUIL   (France)

^c TSINGHUA UNIVERSITY   (China)

^d TIANJIN UNIVERSITY   (China)

Author keywords

Calibration; Scanning force microscopy; Subnanometre uncertainty; Traceability of measurement results

Indexed keywords

CALIBRATION; DIFFRACTION GRATINGS; HELIUM NEON LASERS; INTERFEROMETERS; INTERFEROMETRY; LASER APPLICATIONS; MICROSTRUCTURE; MINIATURE INSTRUMENTS; NANOSTRUCTURED MATERIALS; RADIATION; SEMICONDUCTOR MATERIALS; UNITS OF MEASUREMENT;

CALIBRATED SCANNING FORCE MICROSCOPE; DIMENSIONAL MEASUREMENTS; METROLOGICAL STANDARDS; MINIATURE LASER INTERFEROMETERS; ONE DIMENSIONAL SINUSOIDAL GRATINGS; PICOMETER RANGE; SUBNANOMETRE RANGE; THREE DIMENSIONAL MEASURING RANGE; UNCERTAINTY OF INTERFEROMTER OUTPUT SIGNALS;

SCANNING ELECTRON MICROSCOPY;

EID: 0036472230     PISSN: 01422421     EISSN: None     Source Type: Journal    
DOI: 10.1002/sia.1164     Document Type: Article

References (11)