Multi-probe atomic force microscopy using piezoelectric cantilevers

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 46, Issue 8 B, 2007, Pages 5543-5547

  Satoh, Nobuo ^a   Tsunemi, Eika ^a   Miyato, Yuji ^a   Kobayashi, Kei ^a   Watanabe, Shunji ^b   Fujii, Toru ^b   Matsushige, Kazumi ^a   Yamada, Hirofumi ^a  

^a KYOTO UNIVERSITY   (Japan)

^b NIKON CORPORATION   (Japan)

Author keywords

Frequency modulation detection method; Multi probe atomic force microscopy; Piezoelectric cantilever

Indexed keywords

ELECTRON BEAM LITHOGRAPHY; FOCUSED ION BEAMS; FREQUENCY MODULATION; PIEZOELECTRIC MATERIALS; THIN FILMS;

FREQUENCY MODULATION DETECTION METHOD; INTEGRATED DEFLECTION SENSORS; MULTI-PROBE ATOMIC FORCE MICROSCOPY; PIEZOELECTRIC CANTILEVER;

ATOMIC FORCE MICROSCOPY;

EID: 34548286920     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.46.5543     Document Type: Article

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