Influences of geometrical factors on quantitative surface roughness evaluations by atomic force microscopy

Journal of Nanoscience and Nanotechnology

Volumn 9, Issue 2, 2009, Pages 893-896

  Chen, Yuhang ^a   Huang, Wenhao ^a  

^a UNIVERSITY OF SCIENCE AND TECHNOLOGY OF CHINA   (China)

Author keywords

Atomic force microscopy; Rough surface; Surface metrology

Indexed keywords

ANALYTICAL APPROXIMATION; CORRELATION LENGTHS; GEOMETRICAL FACTORS; GEOMETRICAL PARAMETERS; GEOMETRICAL PROPERTY; HEIGHT DISTRIBUTION; NUMERICAL SIMULATION; ROOT MEAN SQUARE ROUGHNESS; ROUGH SURFACE; ROUGH SURFACES; STANDARD DEVIATION; SURFACE METROLOGY; SURFACE PARAMETER;

ATOMIC FORCE MICROSCOPY; COMPUTER SIMULATION; PHOTORESISTS; ROUGHNESS MEASUREMENT; SURFACE ROUGHNESS;

ATOMS;

EID: 67649243296     PISSN: 15334880     EISSN: None     Source Type: Journal    
DOI: 10.1166/jnn.2009.C048     Document Type: Conference Paper

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