Self-calibration of scanning probe microscope: Mapping the errors of the instrument

Measurement Science and Technology

Volumn 19, Issue 2, 2008, Pages

  Xu, M ^a   Dziomba, T ^a   Dai, G ^a   Koenders, L ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

Nonlinearity; Scanning probe microscopy; Self calibration; Squareness error

Indexed keywords

ERROR ANALYSIS; MAPPING; SCANNING PROBE MICROSCOPY; STANDARDS;

SELF-CALIBRATION; SQUARENESS ERROR;

CALIBRATION;

CALIBRATION; ERROR ANALYSIS; MAPPING; SCANNING PROBE MICROSCOPY; STANDARDS;

EID: 42549097430     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/19/2/025105     Document Type: Article

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