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Volumn 22, Issue 9, 2011, Pages

Tactile 3D microprobe system with exchangeable styli

Author keywords

exchangeable styli; micrometrology; microprobe; optical detection

Indexed keywords

LASER BEAMS; LOCKS (FASTENERS); OPTICAL DESIGN; PRECISION ENGINEERING; PROBES;

EID: 80051680331     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/22/9/094018     Document Type: Article
Times cited : (35)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.