TEM calibration methods for critical dimension standards

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6518, Issue PART 1, 2007, Pages

  Orji, Ndubuisi G ^a   Dixson, Ronald G ^a   Garcia Gutierrez, Domingo I ^b   Bunday, Benjamin D ^c   Bishop, Michael ^c   Cresswella, Michael W ^a   Allen, Richard A ^a   Allgair, John A ^c  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^b ATDF Advanced Technolgy Development Facility Inc   (United States)

^c SEMATECH   (United States)

Author keywords

CD AFM; HAADF STEM; HR TEM; Linewidth

Indexed keywords

INTERFERENCE PATTERNS; SCALE TRACEABILITY;

ATOMIC FORCE MICROSCOPY; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; IMAGE RECONSTRUCTION; LATTICE CONSTANTS; LINEWIDTH;

CALIBRATION;

EID: 35148873567     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.713368     Document Type: Conference Paper

References (19)

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