Ultraprecision micro-CMM using a low force 3D touch probe

Measurement Science and Technology

Volumn 18, Issue 2, 2007, Pages 319-327

  Kung A ^a   Meli, F ^a   Thalmann, R ^a  

^a Swiss Federal Office of Metrology   (Switzerland)

Author keywords

3D probe; Calibration; CMM; Coordinate measuring machine; Dimensional metrology; Error separation; Scanning

Indexed keywords

CALIBRATION; ERROR ANALYSIS; POSITION CONTROL; STIFFNESS;

DIMENSIONAL METROLOGY; ERROR SEPARATION; ROUNDNESS MEASURING MACHINE;

COORDINATE MEASURING MACHINES;

CALIBRATION; COORDINATE MEASURING MACHINES; ERROR ANALYSIS; POSITION CONTROL; STIFFNESS;

EID: 34247242798     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/18/2/S01     Document Type: Conference Paper

References (12)

1. Weckenmann A, Estler T, Peggs G and McMurtry D 2004 Ann. CIRP 53 657-84
2. Peggs G, Lewis A and Oldfield S 1999 Ann. CIRP 48 417-20
3. Brand U, Cao S, Hoffmann W, Kleine-Besten T, Pornnoppadol P and Büttgenbach S 2001 Proc. 2nd Euspen Int. Conf. (Turin, Italy, May 2001) pp 266-9
4. Haitjema H, van Seggelen J K, Schellekens P H J, Priel W O and Puik E 2003 Proc. Memstand Int. Conf. (Barcelona, Spain, February 2003) pp 218-28
5. Johnson K L 1985 Contact Mechanics (Cambridge: Cambridge University Press)
6. van Vliet W P and Schellekens P H 1996 Ann. CIRP 45 483-7
7. Meli F, Fracheboud M, Bottinelli S, Bieri M, Thalmann R, Breguet J-M and Clavel R 2003 Proc. Euspen Int. Topical Conference (Aachen, Germany, May 2003) vol 2 pp 411-4
8. Meli F, Bieri M, Thalmann R, Fracheboud M, Breguet J-M, Clavel R and Bottinelli S 2003 Proc. Coordinate Measuring Machines, ASPE (Charlotte, North Carolina, USA, June 2003) pp 69-73
9. Ruijl T, Franse J and van Eijk J 2001 Proc. 2nd Euspen Int. Conf. (Turin, Italy, May 2001) vol 1 pp 234-7
10. Ruijl T and van Eijk J 2003 Proc. Coordinate Measuring Machines, ASPE (Charlotte, NC, USA, June 2003) pp 33-8
11. Meli F and Küng A 2004 Proc. 4th Euspen Int. Conf. (Glasgow, UK) pp 270-1
12. Küng A and Meli F 2005 Proc. 5th Euspen Int. Conf. (Montpellier, France) vol 1 pp 193-6