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Review of Scientific Instruments

Volumn 81, Issue 12, 2010, Pages

Effect of tip shape on line edge roughness measurement based on atomic force microscopy

(3) Li, Ning a Wang, Fei b Zhao, Xuezeng b

a SHANGHAI SECOND POLYTECHNIC UNIVERSITY (China)

b HARBIN INSTITUTE OF TECHNOLOGY (China)

Author keywords

[No Author keywords available]

Indexed keywords

AFM; EDGE IDENTIFICATION; IN-LINE; MEASUREMENT-BASED; MEASURING ERRORS; TIP SHAPE;

ATOMIC FORCE MICROSCOPY;

ROUGHNESS MEASUREMENT;

EID: 78650868293 PISSN: 00346748 EISSN: None Source Type: Journal
DOI: 10.1063/1.3518973 Document Type: Article

Times cited : (5)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.