Detecting and addressing the surface following errors in the calibration of step heights by atomic force microscopy

Measurement Science and Technology

Volumn 18, Issue 2, 2007, Pages 469-475

  Haycocks, J ^a   Jackson, K ^a  

^a NATIONAL PHYSICAL LABORATORY   (United Kingdom)

Author keywords

Atomic force microscopy; Measurement uncertainty; Traceable calibration

Indexed keywords

ATOMIC FORCE MICROSCOPY; CALIBRATION; DATA REDUCTION; ERROR DETECTION; MEASUREMENT THEORY;

MEASUREMENT UNCERTAINTY; TRACEABLE CALIBRATION; TRACEABLE SYSTEMS;

SURFACE ANALYSIS;

ATOMIC FORCE MICROSCOPY; CALIBRATION; DATA REDUCTION; ERROR DETECTION; MEASUREMENT THEORY; SURFACE ANALYSIS;

EID: 34247252014     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/18/2/S20     Document Type: Conference Paper

References (11)

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