Development of a 3D-AFM for true 3D measurements of nanostructures

Measurement Science and Technology

Volumn 22, Issue 9, 2011, Pages

  Dai, Gaoliang ^a   Häßler Grohne, Wolfgang ^a   Hüser, Dorothee ^a   Wolff, Helmut ^a   Danzebrink, Hans Ulrich ^a   Koenders, Ludger ^a   Bosse, Harald ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

3D AFM; atomic force microscopy; critical dimension; nanoscale dimensional metrology; nanotechnology; tip wear

Indexed keywords

NANOPROBES; NANOTECHNOLOGY; PHOTOMASKS; PROBES; RESONANCE; UNITS OF MEASUREMENT;

ADVANCED LITHOGRAPHY; CRITICAL DIMENSION; DIMENSIONAL METROLOGY; LATERAL OSCILLATIONS; PHYSIKALISCH-TECHNISCHE BUNDESANSTALT; TIP WEAR; TIP-SAMPLE INTERACTION; TORSIONAL OSCILLATION;

ATOMIC FORCE MICROSCOPY;

EID: 80051695032     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/22/9/094009     Document Type: Article

References (8)

1. Martin Y and Wickramasinghe H K 1993 Method for imaging sidewalls by atomic force microscopy Appl. Phys. Lett. 64 2498-500
2. Foucher J 2010 Adapting new technical and metrological advances Co-Nanomet Workshop (Copenhagen, 23 September 2010)
3. Murayama K et al 2006 Critical-dimension measurement using multi-angle-scanning method in atomic force microscope Japan. J. Appl. Phys. 45 5928-32 (Pubitemid 44181832)
4. Garnaes J, Hansen P-E, Agersnap N, Holm J, Borsetto F and Kühle A 2006 Profiles of high aspect-ratio grating determined by spectroscopic scatterometry and atomic-force microscopy Appl. Opt. 45 3201-12
5. Mancevski V and McClurem P F 2003 Development of a dual-probe Caliper™ CD-AFM for near model independent nanometrology Proc. SPIE 4689 83
6. Dixson R G, Allen R A, Guthrie W F and Cresswell M W 2005 Traceable calibration of critical-dimension atomic force microscope linewidth measurements with nanometer uncertainty J. Vac. Sci. Technol. B 23 3028-32 (Pubitemid 41788804)
7. Orji N G and Dixson R G 2007 Higher order tip effects in traceable CD-AFM based linewidth measurements Meas. Sci. Technol. 18 448-55 (Pubitemid 46603780)
8. Huang L and Su C 2004 A torsional resonance mode AFM for in-plane tip surface interactions Ultramicroscopy 100 277-85 (Pubitemid 38834136)