Test object of the linewidth with a trapezoidal profile and three certified sizes for an SEM and AFM

Measurement Science and Technology

Volumn 20, Issue 8, 2009, Pages

  Gavrilenko, V P ^a   Mityukhlyaev, V B ^a   Novikov, Yu A ^b   Ozerin, Yu V ^c   Rakov, A V ^b   Todua, P A ^a  

^a Center for Surface and Vacuum Research   (Russian Federation)

^b PROKHOROV GENERAL PHYSICS INSTITUTE   (Russian Federation)

^c Mikron Corporation   (Russian Federation)

Author keywords

Atomic force microscope; Correlation analysis; Linewidth; Scanning electron microscope; Test object

Indexed keywords

ATOMIC FORCE MICROSCOPY; CORRELATION METHODS; LINEWIDTH; SCANNING ELECTRON MICROSCOPY;

CORRELATION ANALYSIS; CRYSTALLOGRAPHIC PLANE; HIGH QUALITY; ORTHOGONAL DIRECTIONS; RELIEF STRUCTURES; SILICON SURFACES; TEST OBJECT;

QUALITY CONTROL;

EID: 70350697521     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/20/8/084022     Document Type: Article

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