An atomic force microscope for the study of the effects of tip-sample interactions on dimensional metrology

Measurement Science and Technology

Volumn 18, Issue 2, 2007, Pages 350-359

  Yacoot, Andrew ^a   Koenders, Ludger ^b   Wolff, Helmut ^b  

^a NATIONAL PHYSICAL LABORATORY   (United Kingdom)

^b PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

Atomic force microscopy; Dimensional metrology; Tip sample interaction

Indexed keywords

ATOMIC FORCE MICROSCOPY; CANTILEVER BEAMS; DEFLECTION (STRUCTURES); INTERFEROMETERS; X RAY ANALYSIS;

DIMENSIONAL METROLOGY; TIP-SAMPLE INTERACTION;

MEASUREMENT THEORY;

ATOMIC FORCE MICROSCOPY; CANTILEVER BEAMS; DEFLECTION (STRUCTURES); INTERFEROMETERS; MEASUREMENT THEORY; X RAY ANALYSIS;

EID: 34247223253     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/18/2/S05     Document Type: Conference Paper

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