Bilateral comparison of 25 nm pitch nanometric lateral scales for metrological scanning probe microscopes

Measurement Science and Technology

Volumn 21, Issue 3, 2010, Pages

  Misumi, Ichiko ^a   Dai, Gaoliang ^b   Lu, Mingzi ^a   Sato, Osamu ^a   Sugawara, Kentaro ^a   Gonda, Satoshi ^a   Takatsuji, Toshiyuki ^a   Danzebrink, Hans Ulrich ^b   Koenders, Ludger ^b  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

1D grating; AFM; Comparison; Nanometric lateral scale; Pitch calibration; SPM; Traceability

Indexed keywords

ATOMIC FORCE MICROSCOPY; CRYSTAL ATOMIC STRUCTURE; FILM PREPARATION; INTERFEROMETERS; LASER INTERFEROMETRY; UNITS OF MEASUREMENT;

1D GRATING; COMPARISON; INTERNATIONAL COMPARISON; LATERAL SCALE; MULTILAYER THIN FILM STRUCTURE; NATIONAL METROLOGY INSTITUTES; TRACEABILITY; TWO-DIMENSIONAL (2D) GRATINGS;

CALIBRATION;

EID: 77949538832     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/21/3/035105     Document Type: Article

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