Geometrical modelling of scanning probe microscopes and characterization of errors

Measurement Science and Technology

Volumn 20, Issue 8, 2009, Pages

  Marinello, F ^a,b   Bariani, P ^c   Carmignato, S ^a   Savio, E ^a  

^a UNIVERSITY OF PADOVA   (Italy)

^b CIVEN   (Italy)

^c Schaefer South East Europe Srl   (Italy)

Author keywords

Dimensional metrology; Geometrical modelling; Scanning probe microscopy; Traceability

Indexed keywords

CHARACTERIZATION; FUNCTIONS; GEOMETRY; SCANNING PROBE MICROSCOPY;

CARTESIAN COORDINATE SYSTEM; DIMENSIONAL METROLOGY; GEOMETRICAL MODELLING; MEASUREMENT PROCESS; QUANTITATIVE CHARACTERIZATION; QUANTITATIVE EVALUATION; TRACEABILITY; ULTRAHIGH RESOLUTION;

SURFACE TOPOGRAPHY;

EID: 70350671679     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/20/8/084013     Document Type: Article

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