Dimensional micro and nano metrology

CIRP Annals - Manufacturing Technology

Volumn 55, Issue 2, 2006, Pages 721-743

  Hansen, H N ^a   Carneiro, K ^b   Haitjema, H ^c   De Chiffre, L ^a  

^a TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

^b DANISH FUNDAMENTAL METROLOGY   (Denmark)

^c Mitutoyo Research Center Europe   (Netherlands)

Author keywords

Dimensional metrology; Micro technology; Nano technology

Indexed keywords

CALIBRATION;

CRITICAL DIMENSION; DIMENSIONAL METROLOGY; GEOMETRICAL COMPLEXITY; ISSUES AND CHALLENGES; MICRO TECHNOLOGY; NANOMETROLOGY; RESEARCH AND DEVELOPMENT; TOLERANCING;

UNITS OF MEASUREMENT;

EID: 46749151373     PISSN: 00078506     EISSN: 17260604     Source Type: Journal    
DOI: 10.1016/j.cirp.2006.10.005     Document Type: Article

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