Coordinate metrology using scanning probe microscopes

Measurement Science and Technology

Volumn 20, Issue 8, 2009, Pages

  Marinello, F ^a,b   Savio, E ^a   Bariani, P ^c   Carmignato, S ^a  

^a UNIVERSITY OF PADOVA   (Italy)

^b CIVEN   (Italy)

^c Schaefer South East Europe Srl   (Italy)

Author keywords

Coordinate metrology; Scanning probe microscopes; SPM

Indexed keywords

MICROSCOPES; SCANNING;

COORDINATE METROLOGY; DIMENSIONAL CHARACTERIZATION; LOSS OF ACCURACY; MEASURING STRATEGY; RASTER SCANNING; SAMPLE SURFACE; SCANNING PROBES; TIME REDUCTION;

UNITS OF MEASUREMENT;

EID: 70350697812     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/20/8/084002     Document Type: Article

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