Modelling and simulating scanning force microscopes for estimating measurement uncertainty: A virtual scanning force microscope

Measurement Science and Technology

Volumn 22, Issue 9, 2011, Pages

  Xu, Min ^a   Dziomba, Thorsten ^a   Koenders, Ludger ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

measurement uncertainty; modelling; Monte Carlo method; scanning force microscopy; simulation; virtual instrument

Indexed keywords

ATOMIC FORCE MICROSCOPY; ERRORS; INSTRUMENT ERRORS; MICROSCOPES; MODELS; MONTE CARLO METHODS; SCANNING; SCANNING TUNNELING MICROSCOPY;

MEASUREMENT PROCESS; MEASUREMENT UNCERTAINTY; SCANNING APPARATUS; SCANNING FORCE MICROSCOPES; SIMULATION; SIMULATION PROCEDURES; STATISTICAL DISTRIBUTION; VIRTUAL INSTRUMENT;

UNCERTAINTY ANALYSIS;

EID: 80051680499     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/22/9/094004     Document Type: Article

References (18)

1. -2008 VDI GMA 2656 Blatt 1 (Berlin: Beuth)
2. International Organization for Standardization 1993 Guide to the Expression of Uncertainty in Measurement (Geneva: International Organization for Standardization)
3. Kirkup L and Frenkel R B 2006 An Introduction to Uncertainty in Measurement Using the GUM (Cambridge: Cambridge University Press)
4. JCGM101 2008 Evaluation of Measurement Data - Supplement 1 to the 'Guide to the Expression of Uncertainty in Measurement' - Propagation of Distributions Using a Monte Carlo Method (Sèvres, France: JCGM101)
5. Schmitt R et al 2008 Virtuelle messgeräte: definition und stand der entwicklung Tech. Mess. 75 298-310 (in German)
6. Schmitt R, Koerfer F and Bichmann S 2008 Modellierung optischer messprozesse untersuchung der interferenzmikroskopie mittels simulationen Tech. Mess. 75 230-6
7. Bartscher M, Hilpert U, Goebbels J and Weidemann G 2007 Enhancement and proof of accuracy of industrial computed tomography (CT) measurements CIRP Ann. - Manuf. Technol. 56 495-8 (Pubitemid 46901067)
8. Schwenke H, Siebert B R L, Wäldele F and Kunzmann H 2000 Assessment of uncertainties in dimensional metrology by Monte Carlo simulation: proposal of a modular and visual software CIRP Ann. - Manuf. Technol. 49 395-8
9. Koops K R et al 2007 Calibration strategies for scanning probe metrology Meas. Sci. Technol. 18 390-4 (Pubitemid 46603773)
10. Ritter M, Dziomba T, Kranzmann A and Koenders L 2007 A landmark-based 3D calibration strategy for SPM Meas. Sci. Technol. 18 404-14 (Pubitemid 46603775)
11. Melcher J et al 2008 Invited article: VEDA: a web-based virtual environment for dynamic atomic force microscopy Rev. Sci. Instrum. 79 061301
12. Couturier G et al 2001 A virtual non contact-atomic force microscope (NC-AFM): simulation and comparison with analytical models Eur. Phys. J. Appl. Phys. 15 141-7 (Pubitemid 32749865)
13. Polesel-Maris J and Gauthier S 2005 A virtual dynamic atomic force microscope for image calculations J. Appl. Phys. 97 044902
14. Xu M, Dziomba T, Dai G and Koenders L 2008 Self-calibration of scanning probe microscope: mapping the errors of the instrument Meas. Sci. Technol. 19 025105
15. Korpelainen V and Lassila A 2007 Calibration of a commercial AFM: traceability for a coordinate system Meas. Sci. Technol. 18 395-403 (Pubitemid 46603774)
16. Garnæs J et al 2004 True three-dimensional calibration of closed loop scanning probe microscopes Nanoscale Calibration Standards and Methods: Dimensional and Related Measurements in the Micro- and Nanometer Range (Berlin: Wiley) pp 193-204
17. Xu M, Pohlenz F and Dai G 2005 A correction method for the non-linear behaviour of the height measuring system in an SPM Proc. 5th Int. Conf. of the European Society for Precision Engineering and Nanotechnology vol 1 pp 181-4
18. Koenders L, Klapetek P, Meli F and Picotto G B 2006 Comparison on step height measurements in the nano and micrometre range by scanning force microscopes Metrologia 43 (Tech. Suppl.) 04001