A landmark-based 3D calibration strategy for SPM

Measurement Science and Technology

Volumn 18, Issue 2, 2007, Pages 404-414

  Ritter, Martin ^a   Dziomba, Thorsten ^b   Kranzmann, Axel ^a   Koenders, Ludger ^b  

^a BAM FEDERAL INSTITUTE FOR MATERIALS RESEARCH AND TESTING   (Germany)

^b PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

3D standards; Calibration; Distortions; Focused ion beam; Parameter estimation; Scanning probe microscopy; Spatial coupling

Indexed keywords

CALIBRATION; DISTORTION (WAVES); ERROR ANALYSIS; FOCUSED ION BEAMS; PARAMETER ESTIMATION; SCANNING PROBE MICROSCOPY;

NANOMARKER COORDINATES; SPATIAL COUPLING; VERTICAL CALIBRATION;

MEASUREMENT THEORY;

CALIBRATION; DISTORTION (WAVES); ERROR ANALYSIS; FOCUSED ION BEAMS; MEASUREMENT THEORY; PARAMETER ESTIMATION; SCANNING PROBE MICROSCOPY;

EID: 34247279323     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/18/2/S12     Document Type: Conference Paper

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