Microsystems technology: Objectives

Sensors and Actuators, A: Physical

Volumn 56, Issue 1-2, 1996, Pages 151-166

  Fluitman, Jan ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

Microsystems technology

Indexed keywords

ACTUATORS; MICROMACHINING; SILICON SENSORS; STANDARDIZATION;

MICROSYSTEMS TECHNOLOGY (MST);

MICROELECTROMECHANICAL DEVICES;

EID: 0030206308     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/0924-4247(96)01276-9     Document Type: Article

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