Deformable micromirror devices as phase-modulating high-resolution light valves

Sensors and Actuators, A: Physical

Volumn 54, Issue 1-3, 1996, Pages 536-541

  Kück, Heinz ^a   Doleschal, Wolfgang ^a   Gehner, Andreas ^a   Grundke, Wolfram ^a   Melcher, Rolf ^a   Paufler, Jörg ^a   Seltmann, Rolf ^a   Zimmer, Günther ^a  

^a FRAUNHOFER INSTITUTE FOR MICROELECTRONIC CIRCUITS AND SYSTEMS   (Germany)

Author keywords

Active matrix addressing; Deformable viscoelastic layers; Light valves; Micromirror devices; Phase modulation

Indexed keywords

EID: 0001302812     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(95)01198-6     Document Type: Article

References (11)

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