Outer-rotor polysilicon wobble micromotors

Proceedings of the IEEE Micro Electro Mechanical Systems

Volumn , Issue , 1994, Pages 269-272

  Deng, Keren ^a   Mehregany, Mehran ^a  

^a CASE WESTERN RESERVE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BEARINGS (MACHINE PARTS); CHEMICAL VAPOR DEPOSITION; COUPLINGS; ELECTRIC INSULATORS; MASKS; ROTORS (WINDINGS); SCANNING ELECTRON MICROSCOPY; STATORS; TORQUE;

FLANGE BEARING; LOW TEMPERATURE OXIDE; MECHANICAL; PHOSPHORUS DOPED POLYSILICON; POLYSILICON WOBBLE MICROMOTOR; ROTOR OUTER RADIUS;

MICROELECTROMECHANICAL DEVICES;

EID: 0028061033     PISSN: None     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (4)