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Volumn 1, Issue , 1995, Pages 281-284
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Integrated optical encoder
a
a
NTT CORPORATION
(Japan)
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Author keywords
[No Author keywords available]
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Indexed keywords
LIGHT EMISSION;
MICROELECTROMECHANICAL DEVICES;
MICROELECTRONIC PROCESSING;
MIRRORS;
OPTICAL SENSORS;
OPTICAL WAVEGUIDES;
PHOTODIODES;
SEMICONDUCTING GALLIUM ARSENIDE;
SEMICONDUCTOR LASERS;
ETCHED MIRRORS;
GRATING SCALE;
INTEGRATED OPTICAL ENCODER;
MONOLITHIC PHOTODIODES;
OPTICAL MICROSENSORS;
RELATIVE DISPLACEMENT;
INTEGRATED OPTOELECTRONICS;
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EID: 0029489272
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
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Times cited : (21)
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References (8)
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